2020 | vol. 68 | nr. 1 | art. 3

Manufacturing, Encapsulation and Reliability of Micro- and Nano-Sensors

Titu-Marius I. BĂJENESCU
One of the most common applications of MEMS/NEMS is using them as microsensors and micro-actuators. They have become varied in their applications and can be found almost everywhere in everyday life. The popularity of these microsensors and micro-actuators is mostly due to the great advantages that they possess. In addition to their small size, MEMS sensors and micro-actuators consume very little power and are capable of delivering accurate measurements.
Keywords: Microelectromechanical systems, nano-electromechanical systems, manufacturing, packaging, reliability, micro-actuators, microsensors
To cite this article: BĂJENESCU I. T.-M., “Manufacturing, Encapsulation and Reliability of Micro- and Nano-Sensors”, in Electrotehnica, Electronica, Automatica (EEA), 2020, vol. 68, no. 1, pp. 21-27, ISSN 1582-5175.